VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL) DEVICE WITH IMPROVED RELIABILITY

摘要

The invention describes a Vertical Cavity Surface Emitting Laser device (100) comprising at least one first optical resonator, a first electrode (210) and a second electrode (220), wherein the first electrode (210) and the second electrode (220) are arranged to electrically pump the first optical resonator during operation of the Vertical Cavity Surface Emitting Laser device (100), wherein the first electrode (210) or the second electrode (220) comprises at least one electrically conducting layer (132), wherein the electrically conducting layer (132) is arranged around an extended area comprising a first light emission area (20) of the first optical resonator and at least one extension area (40) such that the extended area is bigger than the first light emission area (20). The Vertical Cavity Surface Emitting Laser device (100) may be integrated in a Vertical Cavity Surface Emitting Laser module or in an optical sensor (300). The optical sensor may be integrated in a mobile communication device (400).;The invention further relates to a method of manufacturing such a Vertical Cavity Surface Emitting Laser device (100) and a metallization lift off mask 10 which may be used in such a method of manufacturing.