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COMPOSITE MOLDED PRODUCT CONTACTING WITH CHEMICALS FOR MANUFACTURING SEMICONDUCTOR PRODUCTS WHEN THE CHEMICALS ARE CAUSED TO FLOW
COMPOSITE MOLDED PRODUCT CONTACTING WITH CHEMICALS FOR MANUFACTURING SEMICONDUCTOR PRODUCTS WHEN THE CHEMICALS ARE CAUSED TO FLOW
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机译:当化学物质流淌时,用于制造半导体产品的与化学物质混合的模制产品
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摘要
To provide: a composite molded product which contacts with an insulating material when the insulating material such as a liquid, gas or granule is caused to flow, and which is less susceptible to dielectric breakdown; a distribution mechanism, tank, and device using a sheet formed of the composite molded product for lining the interior of a pipe or a tank; a storage tank in which a part of the surface of a liquid-contact portion is composed of the composite molded product; and a storage method of an organic solvent using the storage tank.SOLUTION: A resin composition containing a matrix resin and an electro-conductive material dispersed in the matrix resin is used as a member which contacts with an insulating material when the insulating material such as a liquid, gas, or granule is caused to flow.SELECTED DRAWING: Figure 1
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