DEPTH DIRECTION COMPOSITION ANALYSIS METHOD, AND ANALYSIS DEVICE INCLUDING THE SAME

摘要

To provide an analysis method of simultaneously obtaining RBS and a CERDA spectrum under an atmosphere of 1 MPa or less other than a vacuum atmosphere, and provide an analysis device having the analysis method.SOLUTION: In a depth direction composition analysis method and an analysis device, incident ions as hydrogen ions having an energy of 8.0×10J - 8.0×10J are radiated to a sample under an atmosphere in which the pressure around a sample is 1 MPa or less. Then, backward scattered ions are detected, and incident ions scattered ahead of the sample and hydrogen in the sample rebounded by the incident ions are simultaneously detected. Thus, the depth direction composition analysis including the hydrogen in the sample is performed.SELECTED DRAWING: Figure 1