METHODS OF STUDYING DYNAMIC SPECIMENS IN TRANSMISSION CHARGED PARTICLE MICROSCOPE

摘要

To provide a method and transmission charged particle microscope for time-resolved study of dynamic/evolving specimens without a large detector or large-amplitude image/detector deflection.SOLUTION: A method includes: sparsifying a beam so as to produce mutually isolated sub-images at a detector level such that deflection of time-resolved images stays in a relatively small region within an image region; and using a scanning assembly to cause relative motion of the image and the detector so as to form the time-resolved sub-images in a neighboring region of the detector.SELECTED DRAWING: Figure 2A