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HARD FILM, COVERING MATERIAL FOR COVERING HARD FILM, SURFACE TREATMENT METHOD, AND TARGET MATERIAL FOR ARC DISCHARGE TYPE ION PLATING
HARD FILM, COVERING MATERIAL FOR COVERING HARD FILM, SURFACE TREATMENT METHOD, AND TARGET MATERIAL FOR ARC DISCHARGE TYPE ION PLATING
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机译：硬膜，用于覆盖硬膜的覆盖材料，表面处理方法以及用于电弧放电型离子镀的靶材料
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摘要
PROBLEM TO BE SOLVED: To provide a hard film and a covering material excellent in oxidation resistance or the like in addition to wear resistance and a slidable characteristic; and to provide a surface treatment device and a surface treatment method.;SOLUTION: A hard film in one embodiment includes (1) an upper layer comprising a nitride having a composition of (AlaSibVcCrd), and a ground layer formed just under the upper layer, and comprising AlCr-based nitride containing Al and Cr as metal components, and a, b, c and d show each wt%, respectively, and satisfy following expressions: 13≤a≤41, 0.03≤b≤15, 0≤c≤15, d=100-(a+b+c).;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT
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机译：解决的问题：除了提供耐磨性和滑动特性之外，还提供一种抗氧化性等优异的硬膜和覆盖材料。解决方案：一个实施例中的硬膜包括（1）上层，该上层包括具有（Al a Si b V c Cr d ），并在上层正下方形成一层接地层，该接地层包含AlCr基氮化物，其中含有Al和Cr作为金属成分， a，b，c和d分别表示重量％，并且满足以下表达式：13≤a≤41、0.03≤b≤15、0≤c≤15，d ＝ 100-（a + b + c）。 ;选定的图纸：图1;版权：（C）2019，JPO＆INPIT
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