PRODUCTION METHOD OF GRAPHITE, PRODUCTION DEVICE OF GRAPHITE, AND GRAPHITE THEREOF

摘要

PROBLEM TO BE SOLVED: To solve the problem of an extremely high production cost due to being required for a condition of high-temperature and high-pressure since a conventional artificial graphite production technique comprises a synthesis process carried out at 3000°C or more and frequently under an applied pressure.;SOLUTION: There is provided a production method of graphite, comprising the steps of supplying raw material containing hydrocarbon or an aromatic compound, and hydrogen to a chemical vapor deposition reaction vessel 5; decompressing a pressure inside the chemical vapor deposition reaction vessel 5 to 1000 Pa or less; and heating a substrate 2 arranged in the chemical vapor deposition reaction vessel at 927°C or more and 1027°C or less.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT