Crystal array detector, small angle scattering measurement apparatus, and small angle scattering measurement method

摘要

The present invention enables measurement and analysis of a structure over a wide range of sizes. A crystal array detector includes a vacuum chamber, a plurality of analyzer crystals disposed along an optical axis in the vacuum chamber, each of which is held at different angles with respect to the optical axis, and the analyzer crystal. A detector for detecting radiation scattered by each of the plurality of analyzer crystals, each of the analyzer crystals having a specific wavelength and a scattering angle out of scattered radiation scattered by an external sample and incident on the vacuum chamber Select and scatter. [Selected figure] Figure 6