VIBRATING STRUCTURE ANGULAR RATE SENSOR, AND PRODUCTION METHOD THEREOF

摘要

To provide a vibrating structure angular rate sensor, and a production method thereof.SOLUTION: A vibrating structure angular rate sensor 400 is provided which comprises: a substrate 406; a plurality of flexible supporting structures 404a, 404b fixed to the substrate 406; an annular member 402 which is flexibly supported by the plurality of supporting structures 404a, 404b to move elastically relative to the substrate 406; and an electrical drive system configured to drive the annular member 402 to oscillate in a primary mode of oscillation with a resonant frequency f. The supporting structures 404a, 404b comprise: at least one active supporting structure 404a which carries an active electrical connection from the annular member 402 to the drive system; and at least one passive supporting structure 404b which does not carry an active electrical connection from the annular member 402 to the drive system.SELECTED DRAWING: Figure 4