To provide a substrate protector preferably depositing a functional film only in one main surface of a substrate, and a method for manufacturing the substrate having a film.SOLUTION: A substrate protector 11 comprises: a base material sheet 12 formed of a flexible material and constituted in a size capable of covering at least a peripheral edge portion of a substrate S; and an adhesive layer 13 for adhesively bonding the substrate sheet 12 with the peripheral edge portion of the substrate S. The base material sheet 12 has an open hole 12a at a position surrounded by the adhesive layer 13. A method for manufacturing a substrate having a film comprises: a preparation step of sucking the substrate through the open hole 12a of the base material sheet 12 to prepare a film deposition substrate obtained by adhesively bonding the substrate protector 11 with the substrate S; and a film formation step of depositing a functional film on a second main surface S2 of the substrate S in the film deposition substrate.SELECTED DRAWING: Figure 1
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