SOFT X-RAY LIGHT SOURCE, EXPOSURE APPARATUS, AND MICROSCOPE

摘要

To provide a soft X-ray light source, in which the conversion efficiency of laser light to soft X-rays is increased.SOLUTION: Provided is a soft X-ray light source, comprising: a laser device 36 in which by irradiating a target 32 with a laser beam 60, a plasma containing element contained in the target is generated, and a soft X-ray 62 is emitted from the plasma; and a chamber 30 in which the target is accommodated inside, and when the laser device irradiates the target with the laser light, the gas pressure of the gas in the inside is set at 10 Pa or more and less than atmospheric pressure.SELECTED DRAWING: Figure 12