物理量センサー、慣性計測装置、移動体測位装置、電子機器、および移動体

摘要

To reduce the degradation of detection accuracy due to the change of gaps due to a warp caused by the stress of a joint member between movable electrode fingers and fixed electrode fingers that are arranged in a pectinate pattern.SOLUTION: A sensor element comprises: pectinate-patterned fixed electrode fingers whose longitudinal direction is along a first direction; and pectinate-patterned movable electrode fingers whose longitudinal direction is along the first direction, facing the fixed electrode fingers across a gap in the second direction orthogonal to the first direction. A physical quantity sensor includes a container for accommodating the sensor element and a substrate for joining the container. With reference to the container, the outer face of the container arranged parallel to a face including the first direction and second direction is joined to the substrate with a joint material provided in a belt-like shape along in the first direction.SELECTED DRAWING: Figure 10