温度計測手段の校正方法、リソグラフィ装置及び物品の製造方法

摘要

To provide a calibration method capable of calibrating a temperature sensor without bringing members each including a temperature sensor into contact with each other.SOLUTION: There is provided a calibration method of temperature measurement means 37 included in a lithographic apparatus which comprises: a first holding part 15 for holding a first object 4; and a second holding part 19 for holding a second object 2 having a coefficient of linear expansion larger than the coefficient of linear expansion of the first object 4. The calibration method comprises the steps of: measuring relative position between a first mark 10 given to the first object 4 and a second mark 11 given to the second object 2; and calibrating the temperature measurement means 37 on the basis of the measured relative position.SELECTED DRAWING: Figure 2