半導体マッハツェンダ光変調器およびＩＱ変調器

摘要

To provide a semiconductor Mach-Zehnder optical modulator capable of preventing degradation in high frequency characteristics due to a common mode and a mixed mode.SOLUTION: A semiconductor Mach-Zehnder optical modulator comprises phase modulation electrode lines 24 to 27 which are formed along waveguides 16 to 19. Output-side leader lines 28 to 31 are bent in a direction crossing an extending direction of the waveguides 16 to 19 in a plane of a dielectric layer and connected to termination resistances 51 to 54, respectively. Each of the output-side leader lines 28 to 31 is formed with a constant width correspond to a desired impedance, and the bending portion and a portion crossing the waveguides 16 to 19 only are formed with narrower widths than a constant width.SELECTED DRAWING: Figure 1