首页> 外国专利> OBSERVATION OBJECT COVER, CONTAINER FOR INTERFERENCE OBSERVATION, INTERFERENCE OBSERVATION APPARATUS, AND INTERFERENCE OBSERVATION METHOD

OBSERVATION OBJECT COVER, CONTAINER FOR INTERFERENCE OBSERVATION, INTERFERENCE OBSERVATION APPARATUS, AND INTERFERENCE OBSERVATION METHOD

机译:观察对象覆盖物,用于干扰观察的容器,干扰观察装置以及干扰观察方法

摘要

To provide an observation object cover, container for the interference observation, interference observation apparatus, and interference observation method capable of implementing interference observation under relaxed observation conditions.SOLUTION: An observation object cover 60, the observation object cover for interference observation, uses first light L1 and second light L2 having a coherent length longer than that of the first light L1 to acquire an interference light image of an observation object 3 by the first light L1, while adjusting an optical path length difference G on the basis of an interference result of the second light L2. The observation object cover 60 comprises: a transmission reflection section 61 that transmits the first light L1 and reflects the second light L2; a support section 62 that supports the transmission reflection section 61 such that a placement face 51a on which the observation object 3 is placed and the transmission reflection section 61 face each other at a prescribed interval A apart.SELECTED DRAWING: Figure 8
机译:为了提供观察对象盖,用于干涉观察的容器,干涉观察装置以及能够在宽松的观察条件下进行干涉观察的干涉观察方法。解决方案:用于观察干涉的观察对象盖60的观察对象盖60使用第一光。 L1和第二光L2的相干长度比第一光L1的相干长度长,以通过第一光L1获取观察对象3的干涉光图像,同时根据干涉结果调节光程长度差G。第二灯L2。观察对象罩60包括:透射反射部61,其透射第一光L1并反射第二光L2;支撑部分62支撑透射反射部分61,使得放置观察对象3的放置面51a和透射反射部分61以预定的间隔A彼此面对。图8

著录项

  • 公开/公告号JP2019109198A

    专利类型

  • 公开/公告日2019-07-04

    原文格式PDF

  • 申请/专利权人 HAMAMATSU PHOTONICS KK;

    申请/专利号JP20170243924

  • 申请日2017-12-20

  • 分类号G01N21/01;G02B21;G01B9/02;G01N21/45;

  • 国家 JP

  • 入库时间 2022-08-21 12:23:26

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