X-RAY DIFFRACTOMETER AND METHOD FOR MEASURING STRESS USING 2D DETECTOR AND SINGLE SAMPLE TILT

摘要

To provide a method for analyzing X-ray diffraction stress of a sample such as a thin film, a coating agent, and a polymer.SOLUTION: The sample has a surface having two orthogonal axes Sand Sin the surface plane, and a third axis Sperpendicular to the sample surface plane. The X-ray beam is directed to the sample surface at a relatively low angle relative to the surface plane. The X-ray energy is diffracted from the sample and detected using a 2-dimensional X-ray detector in a plurality of rotational orientations of the sample around S. The third axis Sis maintained at a constant tilt angle during the overall X-ray diffraction stress analysis, thereby avoiding significant errors associated with the motion of the cradle track of the goniometer used for X-ray diffraction stress analysis, which are very sensitive to the movement at a low angle of 2θ.SELECTED DRAWING: Figure 11