IMPRINT DEVICE, IMPRINT METHOD, AND CONTROL METHOD FOR IMPRINT DEVICE

摘要

To provide an imprint device and imprint method, which are capable of preventing a foreign object, such as a particle, from adhering to a mold.SOLUTION: An imprint device 10 comprises: a chamber 11; a stage unit 13 that is arranged in the chamber 11, includes a base material holding part 23 for holding a base material 40, and is capable of moving in a horizontal direction; and an alignment camera 16, dispenser head 17, and a mold holding part 18 for holding a mold 50, each of which is arranged in the chamber 11. An air flow formation part 19 for forming an air flow F from one side to the other side is arranged in the chamber 11. Both of the dispenser head 17 and alignment camera 16 are positioned downstream of the air flow F from the mold holding part 18.SELECTED DRAWING: Figure 1