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QUALITY DATA ANALYSIS SYSTEM AND QUALITY DATA ANALYSIS METHOD

机译:质量数据分析系统和质量数据分析方法

摘要

PROBLEM TO BE SOLVED: To provide a technology for selecting a proper defective analysis technique dependent on the timing that a certain time has elapsed since maintenance or replacement of a processing facility.SOLUTION: A quality data analysis system includes a memory unit and control unit, and analyzes the quality of a product processed by a processing facility. The memory unit stores work data and quality inspection data. The control unit includes a dividing-processing facility data-into-first area unit that divides the whole of processing facility data into one or more first areas on the basis of a statistical quantity of a quality measured value extracted based on processing facility data that is a pair of a maintenance frequency and a product processing frequency, and a defective analysis technique selection unit that outputs a defective analysis technique, which exhibits a higher estimated precision than a predetermined precision, or a defective analysis technique, which exhibits the highest estimated precision, from among preregistered defective analysis techniques which estimate a quality measured value on the basis of the quality inspection data and work data.SELECTED DRAWING: Figure 3
机译:要解决的问题:提供一种技术,以根据自维护或更换处理设备以来经过一定时间后的时间选择适当的缺陷分析技术。解决方案:质量数据分析系统包括存储单元和控制单元,并分析由处理设施处理的产品的质量。存储器单元存储工作数据和质量检查数据。控制单元包括划分处理设备数据至第一区域单元,其基于基于处理设备数据提取的质量测量值的统计量将整个处理设备数据划分为一个或多个第一区域。一对维修频率和产品处理频率,以及输出分析性能比预定精度高的缺陷分析技术或分析精度最高的缺陷分析技术的缺陷分析技术选择单元,从预先注册的缺陷分析技术中,这些技术根据质量检查数据和工作数据估算质量测量值。选择的图纸:图3

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