首页> 外国专利> THIN-FILM TRANSISTOR SUBSTRATE, LIQUID CRYSTAL DISPLAY ELEMENT, ORGANIC EL ELEMENT, RADIOSENSITIVE RESIN COMPOSITION, AND MANUFACTURING METHOD OF THIN-FILM TRANSISTOR SUBSTRATE

THIN-FILM TRANSISTOR SUBSTRATE, LIQUID CRYSTAL DISPLAY ELEMENT, ORGANIC EL ELEMENT, RADIOSENSITIVE RESIN COMPOSITION, AND MANUFACTURING METHOD OF THIN-FILM TRANSISTOR SUBSTRATE

机译:薄膜晶体管基体,液晶显示元件,有机元素,放射线敏感性树脂组成以及薄膜晶体管基体的制造方法

摘要

PROBLEM TO BE SOLVED: To provide: a thin-film transistor substrate having an interlayer insulation film which is hard to cause the whitening in a high-temperature treatment and in which the occurrence of outgassing is suppressed; a liquid crystal display element and an organic EL element, each including the thin-film transistor substrate; a radiosensitive resin composition which enables the suitable formation of the interlayer insulation film as described above; and a method for manufacturing the thin-film transistor substrate.;SOLUTION: A thin-film transistor substrate comprises: a substrate; a thin-film transistor disposed on the substrate; and an interlayer insulation film disposed on the thin-film transistor. The interlayer insulation film includes a polymer having a structure represented by the formula (1) below. (In the formula (1), R1 represents a divalent coupling group including a heteroatom, R2 represents a monovalent organic group including an aromatic ring, and * represents a coupling portion.);SELECTED DRAWING: None;COPYRIGHT: (C)2019,JPO&INPIT
机译:解决的问题:提供一种具有层间绝缘膜的薄膜晶体管基板,该层间绝缘膜在高温处理中难以引起白化,并且可以抑制脱气的发生。液晶显示元件和有机EL元件,分别包括薄膜晶体管基板。如上所述的放射线敏感性树脂组合物,其能够适当地形成层间绝缘膜。解决方案:一种薄膜晶体管基板,包括:基板;以及形成所述薄膜晶体管基板的方法。薄膜晶体管设置在基板上;层间绝缘膜设置在薄膜晶体管上。层间绝缘膜包括具有由下式(1)表示的结构的聚合物。 (在式(1)中,R 1 表示包括杂原子的二价偶联基,R 2 表示包括芳环的一价有机基,*表示偶联部分;);选定的图纸:无;版权:(C)2019,JPO&INPIT

著录项

  • 公开/公告号JP2018182305A

    专利类型

  • 公开/公告日2018-11-15

    原文格式PDF

  • 申请/专利权人 JSR CORP;

    申请/专利号JP20180026497

  • 申请日2018-02-16

  • 分类号H01L21/336;H01L29/786;G02F1/1368;G02F1/1333;G09F9/30;G09F9/00;G03F7/023;G03F7/075;G03F7/20;C08G77/04;

  • 国家 JP

  • 入库时间 2022-08-21 12:22:09

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