High-resolution full-material Fresnel zone plate array and manufacturing method thereof

摘要

An object of the present invention is to provide a high resolution full material Fresnel zone plate array including a plurality of full material Fresnel zone plates on a common carrier, and a common carrier including a plurality of micro pillars. A method of manufacturing a full material Fresnel zone plate precursor array by depositing alternating layers of at least two different materials on at least some of the micropillars, and manufacturing a high resolution full material Fresnel zone plate array Relates to the device. An apparatus for manufacturing a full material Fresnel zone plate array includes at least two of a first device for providing a plurality of micropillars in a common carrier and at least some of the micropillars disposed on the common carrier. Including vapor deposition devices that apply alternating layers of different materials and slicing devices that slice the full material Fresnel zone plate from the pillars. [Selection] Figure 1