Evaluation method and evaluation program of surface roughness and interface roughness by X-ray reflectometry

摘要

PROBLEM TO BE SOLVED: To obtain two-dimensional information including a correlation distance about concavity and convexity of surfaces/interfaces by an X-ray reflectance method.SOLUTION: A two-dimensional information evaluation method is configured to: irradiate a sample with an X-ray, detect intensity of a mirror surface reflection X-ray reflecting in a mirror surface reflection direction, and measure X-ray reflectance serving as a ratio of the mirror surface reflection X-ray intensity with respect to incident X-ray intensity (S10); set an initial value of a parameter about an analysis mode of the sample (S12); analyze refraction, reflection and interference of the X-ray, and calculate the X-ray reflectance (S14); repeat the calculation while changing the parameter until a difference between the measurement value of the X-ray reflectance and the calculation value thereof falls within a tolerance range (S16 and S18); and obtain information on a multi-layer structure of the sample (S20). As to one or more of a surface or interface of each layer of the analysis model thereof, the parameter is configured to include: roughness representing a size in a height direction of concavity/convexity of the surface or interface; and a correlation distance representing an interval in a perpendicular direction with respect to the height direction of the concavity/convexity.SELECTED DRAWING: Figure 2