PHASE SHIFT DIGITAL HOLOGRAPHY APPARATUS AND PROGRAM THEREOF

摘要

To solve the problem in which since it is difficult to accurately move an optical path length of reference light in phase shift digital holography, an interference fringe image having an accurate phase shift amount cannot be obtained, and image quality of a reconstructed image deteriorates, and in which development of a technology to improve the image quality of the reconstructed image by detecting a phase shift amount of reference light due to low operation accuracy of a phase shift apparatus and correcting an interference fringe image is desired.SOLUTION: An interference fringe image between a laser beam irradiated on a measurement object and phase shifted reference light is recorded by a camera 2, and a phase shift amount due to low operating accuracy of a phase shift apparatus is detected from a regularity fringe pattern using a moire image processing technique. After the interference fringe image for the object recorded by a camera 1 is corrected by the detected phase shift amount, the interference fringe image is reconstructed, image quality of the reconstructed image is improved, and measuring accuracy is improved.SELECTED DRAWING: Figure 7