Substrate with built-in photonic crystal, method of manufacturing the same, and surface emitting quantum cascade laser

摘要

PROBLEM TO BE SOLVED: To provide a photonic crystal built-in substrate incorporating a two-dimensional diffraction lattice of easy polarization direction control, and to provide a manufacturing method thereof and a mass productivity rich plane emission quantum cascade laser.SOLUTION: A photonic crystal built-in substrate has a compound semiconductor substrate, a dielectric layer, and a first semiconductor layer. The dielectric layer is provided on the surface of the compound semiconductor substrate, and arranged at the lattice points of respective two-dimensional diffraction lattices. Each dielectric layer has a shape asymmetrical with respect to at least one of the sides of the two-dimensional diffraction lattices, and has a refractive index lower than that of the compound semiconductor substrate. A semiconductor laminate has a first flat face covering the dielectric layer and the surface of the compound semiconductor substrate, and the layer composing the first face contains a material capable of lattice matching with material composing the compound semiconductor substrate.SELECTED DRAWING: Figure 1