Thin film magnetic field sensor and array type thin film magnetic field sensor

摘要

PROBLEM TO BE SOLVED: To provide a thin film magnetic field sensor causing a quite small leakage magnetic field from a thin film magnet as a magnetic bias mechanism, and an array type thin film magnetic field sensor having a plural of the thin film magnetic field sensor.SOLUTION: A thin film magnetic field sensor 10 includes: a magnetoresistive thin film 1 whose electrical resistance changes according to an external magnetic field; a pair of soft magnetic thin films 2 respectively arranged at both sides of the magnetoresistive thin film 1; and a thin film magnet 3 for applying a magnetic bias to the magnetoresistive thin film 1. The thin film magnet 3 is formed on a substrate 4. The soft magnetic thin films 2 are formed on the thin film magnet 3 and arranged so as to cover a section containing at least the magnetic poles of the thin film magnet 3. The array type thin film magnetic field sensor is configured by arranging a plurality of the thin film magnetic field sensors 10 on the substrate.SELECTED DRAWING: Figure 1