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摺動部材

机译:滑动件

摘要

PROBLEM TO BE SOLVED: To provide a slide member in which it is possible to eliminate waste at the time of exchange, and which can obtain an excellent physical property.;SOLUTION: An endless slide member 1, which is set to a peripheral edge part of a substrate W when polishing the substrate W, comprises: a base material layer 2 having a flat surface of a substantially ring shape; an adhesive layer 3 which is adhered to the base material layer 2 and has a flat surface of a substantially ring shape; and a resin sheet layer 4 which is detachably adhered to the adhesive layer 3 and surrounds the substrate W. The resin sheet layer 4 is configured from an extrusion molded resin sheet 5 which contains a polyarylene ether ketone resin and which has a thickness of 100 μm or more and 1000 μm or less. When the resin sheet layer 4 of the slide member 1 has worn, the worn resin sheet layer 4 is released and removed from the adhesive layer 3, whereby only the resin sheet layer 4 can be exchanged, and it is not required to exchange the whole of the slide member 1 including the base material layer 2.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT
机译:解决的问题:提供一种滑动部件,其可以消除更换时的浪费,并且可以获得优异的物理性能。解决方案:环形滑动部件1,其设置在外围边缘部分。当抛光基板W时,基板W的表面W包括:具有基本为环形的平坦表面的基底材料层2;以及基底层2。粘接剂层3,其粘接在基材层2上并具有大致环状的平坦面。树脂片层4由包含聚亚芳基醚酮树脂且厚度为100μm的挤出成型树脂片5构成,该树脂片层4以可剥离的方式粘附于粘合剂层3并包围基板W。大于等于1000μm。当滑动构件1的树脂片层4已经磨损时,磨损的树脂片层4被释放并从粘合层3上去除,从而仅树脂片层4可以被更换,并且不需要整体更换。包括基础材料层2的滑动构件1的示意图;;选定的图纸:图1;版权:(C)2019,JPO&INPIT

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