PROBLEM TO BE SOLVED: To provide a TFT glass substrate capable of highly accurately and/or quickly forming an element or a structure.;SOLUTION: A TFT glass substrate 1 is formed of a rectangular glass plate 10 including a first main surface 11 and a second main surface 12 opposite to the first main surface 11. In visual field from the thickness direction of the glass plate 10, the large-sized glass plate 10 includes the first main surface 11, the second main surface 12 opposite to the first main surface 11, a first side 13 connecting the first main surface 11 and the second main surface 12 and a second side 14 adjacent to the first side 13, and the first side 13 and the second side 14 have a length of at least 1200 mm or more. A plate thickness tolerance being a difference between the maximum Wmax of thickness W of the glass plate 10 and the minimum Wmin of thickness W in a first cross section 15 is less than 6.26 μm.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT
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