Li ion conductive fine particles and manufacturing method thereof, method of manufacturing amorphous LiPON fine particles, manufacturing method of electrolyte layer and electrode layer, lithium ion secondary battery and manufacturing method thereof

摘要

PROBLEM TO BE SOLVED: To provide Li ion conductive fine particles having a LIPON layer at least on surfaces thereof.SOLUTION: Li ion conductive fine particles 13 include LiPOfine particles 11 and amorphous LIPON layers 12 formed at least on surfaces of the LiPOfine particles. In a production method of the fine particles 13, the LiPOfine particles 11 are housed in a vessel, an electrode opposite to the inner face of the vessel is provided, a nitrogen gas or a gas including nitrogen is introduced into the vessel, the inside of the vessel is evacuated, plasma is formed by supplying electric power between the electrode and the vessel, and the amorphous LIPON layers 12 are formed on the surfaces of the LiPOfine particles 11 by oscillating or rotating the vessel.SELECTED DRAWING: Figure 1