METHOD FOR EVALUATING ULTRAPURE WATER, METHOD FOR EVALUATING MEMBRANE MODULE FOR MANUFACTURING ULTRAPURE WATER, AND METHOD FOR EVALUATING ION EXCHANGE RESIN FOR MANUFACTURING ULTRAPURE WATER

摘要

To provide a method capable of evaluating the quality of ultrapure water used in cleaning of a wafer and the like with more accuracy and in a short time.SOLUTION: A method for evaluating ultrapure water includes: a contact step of bringing ultrapure water into contact with a wafer; a profile creation step of creating a surface shape profile of a defined two-dimensional region on a surface of the wafer which came into contact with the ultrapure water using a scanning electron microscope; and an evaluation step of counting the number of non-flat portions in the two-dimensional region using the surface shape profile and evaluating that the larger the number of non-flat portions is, the lower the quality of the ultrapure water becomes.SELECTED DRAWING: Figure 2