PROBLEM TO BE SOLVED: To provide a vapor deposition apparatus capable of quickly and certainly removing heat generated by an electric magnet and capable of easily attaching/detaching and aligning a target substrate with a vapor deposition mask.;SOLUTION: A vapor deposition apparatus is equipped with a vacuum chamber 8, a mask holder 15, a substrate holder 29 for holding a target substrate 2 so that the target substrate touches a vapor deposition mask 1, an electric magnet 3 arranged above a touch plate 4 installed opposite the vapor deposition mask 1 across the target substrate 2, a vapor deposition source 5 installed opposite the vapor deposition mask 1 for vaporizing or sublimating a vapor deposition material 51, and a heat pipe 7 of which at least a first end part, a heat absorbing part 71 touches the electric magnet 3 and of which a second end part, a heat releasing part 72 opposite the heat absorbing part 71 protrudes from the vacuum chamber 8. The heat pipe 7 is tight bonded with the electric magnet 3 in an area same as or larger than the cross-sectional area of the inner periphery of a coil 32 of the electric magnet 3.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT
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