蒸着装置、蒸着方法及び有機ＥＬ表示装置の製造方法

摘要

PROBLEM TO BE SOLVED: To provide a vapor deposition apparatus that can prevent heat generation from a magnet chuck at the time of vapor deposition while making it hardly be influenced by a magnetic field at the time of positioning a vapor deposition substrate to a vapor deposition mask, and to provide a vapor deposition method and a method for manufacturing an organic EL display device.;SOLUTION: A vapor deposition apparatus includes a magnet chuck 3 constituted of a permanent magnet 3A and an electromagnet 3B. The vapor deposition apparatus lowers an influence from a magnetic field by weakening the magnetic field of the permanent magnet using the electromagnet at the time of positioning a vapor deposition substrate 2 to a vapor deposition mask 1, and after the positioning, turns off the electromagnet and attracts the vapor deposition mask with a strong magnetic field only by the permanent magnet, thereby not generating heat.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2019,JPO&INPIT