熱式流量計

摘要

PROBLEM TO BE SOLVED: To accurately measure a flow rate even in a case where a temperature of fluid to be measured changes.;SOLUTION: A sensor unit 101 is configured to, when a heater is driven so that the difference between a temperature of the heater and a temperature of fluid at a position not affected by thermal effect of the heater becomes preset setting temperature difference, output a sensor value (first value) depending on a state of thermal diffusion in fluid heated by the heater. A correction unit 102 is configured to calculate a correction sensor value (second value) obtained by correcting the sensor value output by the sensor unit 101 according to the temperature of the fluid, and output it. A flow rate calculation unit 103 is configured to calculate a flow rate of fluid based on the correction sensor value corrected by the correction unit 102.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT