タンタル酸リチウム基板の評価方法

摘要

PROBLEM TO BE SOLVED: To provide a simple method for evaluating degree of reduction in a reduced lithium tantalate substrate on the basis of specific volume resistance of the lithium tantalate substrate.;SOLUTION: A method for evaluating degree of reduction in a reduced lithium tantalate substrate on the basis of specific volume resistance of the lithium tantalate substrate, comprises measuring absorption coefficient of the lithium tantalate substrate with light having a wavelength of 600 nm; and determining that the specific volume resistance of the lithium tantalate substrate is within a range of 5×10⁹-2×10¹¹ Ω cm, where the lithium tantalate substrate exists under an environment that the measured absorption coefficient of the lithium tantalate substrate is within a range of 20-29 cm^-1.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2019,JPO&INPIT