PROBLEM TO BE SOLVED: To provide a heating energization device capable of making current flow in a horizontal direction (in-plane direction) through an object in a sheet shape (an object to be processed).;SOLUTION: A heating energization device includes: a first support body 7 and second support body 2 for performing energization on an object to be processed in its in-plane direction or vertical direction to heat the object to be processed, the first support body and second support body being disposed so as to face each other; a first electrode 13 located on the first support body's side closer to the second support body; and a second electrode 12 located on the second support body's side closer to the first support body. The first electrode and second electrode are disposed so as not to overlap with each other. Current density at the time of energizing the object to be processed is equal to or higher than 50A/cm2 and equal to or lower than 900A/cm2.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2019,JPO&INPIT
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机译:要解决的问题:提供一种能够使电流沿水平方向(平面方向)流过片状物体(待处理物体)的加热装置。解决方案:一种加热装置包括:第一支撑体7和第二支撑体2,用于沿其面内方向或垂直方向对被加工体进行通电以加热被加工体,第一支撑体和第二支撑体被设置为面向彼此;第一电极13,位于比第二支撑体更靠近第一支撑体的一侧。第二电极12位于第二支撑体的更靠近第一支撑体的一侧。设置第一电极和第二电极以使其彼此不重叠。给待加工物体通电时的电流密度等于或高于50A / cm 2 Sup>,并且等于或低于900A / cm 2 Sup>。 :图2;版权:(C)2019,JPO&INPIT
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