半導体装置の検査方法、半導体装置の製造方法、及び検査装置

摘要

PROBLEM TO BE SOLVED: To reduce discharge without using a special device for spraying of an insulation gas, insulation immersion and the like.;SOLUTION: An inspection method of a semiconductor device, includes: a voltage apply step of applying an inspection voltage to the semiconductor device by increasing a voltage to a second voltage higher than a first voltage after an inspection device increases a reference voltage to the first voltage lower than a proof pressure actual value; and an inspection step of inspecting the proof voltage of the semiconductor device after the inspection device applies the inspection voltage in the voltage apply step.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT