Factor analysis method

摘要

PROBLEM TO BE SOLVED: To provide an element analysis method capable of analyzing impurity elements in a sample including a silicon containing compound with accuracy 1,000 times compared with conventional one while preventing an element analyzer from being blocked by the deposition of a silicon matrix.SOLUTION: The method for analyzing impurity elements in a sample including a silicon containing compound comprises: decomposing the silicon containing compound included in the sample using an automatic vapor phase decomposition apparatus including at least a heating mechanism, a liquid sending mechanism and a conveyance mechanism; removing a silicon part in the sample after the decomposition to prepare a sample for element analysis; automatically injecting the prepared sample for element analysis into the element analyzer; and analyzing impurity elements in the sample for element analysis.SELECTED DRAWING: Figure 1