Sensor for detecting conductive and / or polarizable particles, sensor system, method for operating the sensor, method for manufacturing this type of sensor and use

摘要

A sensor for detecting electrically conductive and/or polarizable particles, in particular for detecting soot particles, includes a substrate, a first electrode layer, and a second electrode layer, which is arranged between the substrate and the first electrode layer. An insulation layer is formed betweem the first electrode layer and the second electrode layer and at least one opening is formed in the first electrode layer and in the insulation layer, wherein the opening of the first electrode layer and the opening of the insulation layer are arranged one over the other at least in some segments in such a way that at least one passage to the second electrode layer is formed.