Electrical resistance measurement probe and electrical resistance measurement system

摘要

PROBLEM TO BE SOLVED: To provide an electric resistance measurement probe and an electric resistance measurement system with which it is possible to measure electric resistance between a conductive film and a grounding electrode in a state in which an electric circuit module is reliably stuck in place by suction.SOLUTION: An electric resistance measurement probe 10 includes a tubular probe body 1 having a bottom 1a at end one, and a first electrode 2a and a second electrode 2b. The bottom 1a is provided with a trapezoidal projection 1c having an open hole 1b and a top face tp orthogonal to the longitudinal center axis of the probe body 1. The open hole 1b is formed at the top face tp of the projection 1c. Each of the other principal surfaces of the first electrode 2a and second electrode 2b is joined to the end face of the bottom 1a so that each of the one principal surfaces of the first electrode 2a and second electrode 2b intersects the longitudinal center axis ax of the probe body at right angles, with the first electrode 2a and the second electrode 2b electrically insulated from each other by the projection 1c. The one principal surface 2a1 of the first electrode 2a, the one principal surface 2b1 of the second electrode 2b, and the top face tp of the projection 1c are in the same plane.SELECTED DRAWING: Figure 1