Vacuum pump and method for estimating cause of abnormality of vacuum pump

摘要

Provided are a vacuum pump and a method for the vacuum pump in which, when contact between a rotating body and a stator is sensed, the cause of the contact can be analyzed. Contact determination is made using a threshold for rotating body contact determination for a displacement signal and a threshold for rotating body contact determination for an acceleration signal. The amount of unbalance of a rotating body is determined using a threshold for amount-of-unbalance increase determination for the displacement signal and a threshold for amount-of-unbalance increase determination for the acceleration signal. When, in one of the displacement signal and the acceleration signal, the threshold for amount-of-unbalance increase determination or the threshold for amount-of-unbalance increase determination is exceeded within a predetermined time before determination of an estimated time point of contact, the contact is determined not to be caused by an increase in accumulation of products.