Rotation mechanism and film thickness monitor equipped with this rotation mechanism

摘要

The present invention relates to a rotation mechanism which is provided with: a motor (2); an output shaft (3) powered by the motor (2) to rotationally drive a rotationally driven body (7); and a roller bearing (6) fitted over the output shaft (3) to support the output shaft (3), the mechanism being adapted such that a rotation drive body (4) is disposed at the top of the output shaft (3) so that the rotation drive body (4) is coupled to the rotationally driven body (7) via a rotational force transfer means (5); and an outer ring (61) of the roller bearing is fitted into grooves (51a, 51b) provided in a rotational force transfer means (8). This allows the present invention to implement a structure which makes the roller bearing resistant to fatigue and thereby achieve a long service life.