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C-PARTICLE DISPERSED Pe-Pt-BASED SPUTTERING TARGET

机译:C粒子分散基于Pe-Pt的溅射靶标

摘要

PROBLEM TO BE SOLVED: To provide a sputtering target for use in deposition of a granular type thin film in a magnetic recording medium and having a high sputtering rate and a discharging stability.SOLUTION: A sintered sputtering target having a structure in which C (carbon) particles are dispersed in a parent metal composed of Fe and Pt, is provided in which a peak intensity ratio (I/I) in a microscopic Raman scattering spectrum measured on the C particles is less than 1.0 at a measurement point 2 m or more away from the interface with the mother metal, and is 1.0 or more at a measurement point 2 m or less away from the interface with the mother metal.
机译:解决的问题:提供一种用于在磁记录介质中沉积粒状薄膜并且具有高溅射速率和放电稳定性的溅射靶。解决方案:具有C(碳)颗粒分散在由Fe和Pt组成的母体金属中,其中在2 m或更大的测量点上,在C颗粒上测得的显微拉曼散射光谱的峰强度比(I / I)小于1.0远离母金属的界面,并且在距母金属的界面2 m或更短的测​​量点处为1.0或更大。

著录项

  • 公开/公告号JP6422096B2

    专利类型

  • 公开/公告日2018-11-14

    原文格式PDF

  • 申请/专利权人 JX金属株式会社;

    申请/专利号JP20140052400

  • 发明设计人 佐藤 敦;

    申请日2014-03-14

  • 分类号C23C14/34;C22C5/04;C22C38;G11B5/65;G11B5/851;

  • 国家 JP

  • 入库时间 2022-08-21 12:18:13

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