Ion beam functional permeable film, beam line device using ion beam functional permeable film, filter device using ion beam functional permeable film, adjustment method of filter device

摘要

In order to provide an ion beam functional permeable film capable of improving the transmittance of ion beams and improving emittance, the ion beam functional permeable film according to the present invention is an ion traveling in one direction. An ion beam functional permeable film for use in a beam line apparatus through which a beam passes and having a channel, wherein a channel axis is substantially parallel to a traveling direction of the ion beam.