Drive control device for vacuum pump, vacuum pump, and method of manufacturing control circuit board for vacuum pump

摘要

In a separating wall, which separates a vacuum region from a region under atmospheric pressure, pins are provided as a current lead-through. The pins are cast in, for example, glass. A plug-in contact is arranged on a separate carrier plate in order to prevent force or stresses, which can occur in particular because of tolerances, from being introduced into the glass. The carrier plate is connected to the control device by a flexible cable.