Highly sensitive Magnetic Sensor suction, which pushes through, crosses music

摘要

A high sensitivity push-pull bridge magnetic sensor, wherein the sensor comprises two substrates (20, 21), magnetoresistive sense elements (22, 42), push-arm flux concentrators (23), and pull-arm flux concentrators (41), wherein the magnetization directions of the pinning layers of the magnetoresistive sense elements (22, 42) on the same substrate (20, 21) are the same, but are opposite to the magnetization directions of the pinning layers of the magnetoresistive sense elements (22, 42) on the adjacent substrate (20, 21), and the magnetoresistive sense elements (22) on one substrate (20) are electrically interconnected to form a push-arm of the bridge, and the magnetoresistive sense elements (42) on the other substrate (21) are electrically interconnected to form a pull-arm of the bridge. The magnetoresistive sense elements (22, 42) on the push-arm and pull-arm are aligned respectively in the gaps between two adjacent push-arm flux concentrators (23) and two adjacent pull-arm flux concentrators (41). This sensor can be implemented as a quasi-bridge structure, a half-bridge structure, or a full-bridge structure. The sensor has the advantages of small offset, high sensitivity, excellent linearity, and low noise.