CHUCK FOR PROBER AND PROBER INCLUDING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a chuck for prober with less variation in the electrical resistance.SOLUTION: In a chuck 5 for prober including a ceramic substrate 8 consisting of a ceramic sintered compact containing aluminum oxide as a main component, and a plurality of electrode layers 9 formed on the surface of the ceramic substrate 8, and independent electrically from each other, the ceramic substrate 8 has a plurality of pores dispersed on the surface, and the average value of the distance between centroids of adjoining pores on the surface is 4 times or more of the average value of the equivalent circle diameter of the pore.SELECTED DRAWING: Figure 1