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Specific resistance value adjusting device and specific resistance value adjusting method
Specific resistance value adjusting device and specific resistance value adjusting method
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机译:电阻率值调整装置及电阻率值调整方法
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摘要
A resistivity regulating apparatus includes: a gas dissolving device that causes a regulating gas to dissolve in a liquid targeted for resistivity regulation to generate a treated liquid in which the regulating gas is dissolved in the liquid, the regulating gas being used to regulate a resistivity of the liquid; and a buffer tank to which the treated liquid discharged from the gas dissolving device is fed.
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