Ammonia dissolved water supply system, ammonia dissolved water supply method, and ion exchange apparatus

摘要

PROBLEM TO BE SOLVED: To supply ammonia dissolved water having a desired quality to a use point in a state having high cleanliness.SOLUTION: Disclosed is a system 1 for supplying ammonia dissolved water, from which ammonia dissolved water obtained by dissolving ammonia into pure water or ultra pure water is supplied to a use point 2. This system includes: an ammonia dissolving device 3 for generating ammonia dissolved water; and an ion exchange device 4 which removes ionic impurities contained in ammonia dissolved water and which is packed with a cation exchange body of ammonium ion type.SELECTED DRAWING: Figure 1