MICROWAVE IRRADIATION DEVICE AND MICROWAVE IRRADIATION METHOD

摘要

PROBLEM TO BE SOLVED: To reduce a frequency of cracking an irradiated surface of a body to be heated when irradiating the body to be heated with a converged microwave.SOLUTION: A microwave irradiation device includes: a microwave source generating a microwave of which the frequency is 10 GHz to 300 GHz; a reflection mechanism for reflecting and converging the microwave generated from the microwave source; and a pedestal on which an object (a body to be heated) to be irradiated with the microwave reflected by the reflection mechanism is placed. By utilizing the microwave irradiation device, the body to be heated placed on the pedestal is irradiated with the reflected and converged microwave. The body to be heated is irradiated with the reflected microwave in the state where a permeation plate of which the "half-life depth " is 100 mm or more and which is formed from a "microwave permeable material" is interposed in an area where the reflected microwave passes, between the reflection mechanism and the body to be heated placed on the pedestal.