Dibasic acid sensor and method for continuously measuring dibasic acid concentration in a substance

摘要

A method for measuring a concentration of dibasic acid in a cleaning process substance is provided. The method includes sending a plurality of voltage pulses through the cleaning process substance by each a first electrode and a second electrode. Each the first electrode and the second electrode is in contact with the cleaning process substance containing a concentration of dibasic acid. The method also includes receiving current responses generated by the plurality of voltage pulses, and analyzing the current responses using a multivariate data analysis for calculation of the concentration of dibasic acid in the cleaning process substance. A dibasic acid sensor, a control unit, and an analyzing unit for performing the method, are also provided.