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Guard ring design enabling in-line testing of silicon bridges for semiconductor packages

机译:保护环设计可在线测试半导体封装的硅桥

摘要

Guard ring designs enabling in-line testing of silicon bridges for semiconductor packages, and the resulting silicon bridges and semiconductor packages, are described. In an example, a semiconductor structure includes a substrate having an insulating layer disposed thereon. A metallization structure is disposed on the insulating layer. The metallization structure includes conductive routing disposed in a dielectric material stack. The semiconductor structure also includes a first metal guard ring disposed in the dielectric material stack and surrounding the conductive routing. The first metal guard ring includes a plurality of individual guard ring segments. The semiconductor structure also includes a second metal guard ring disposed in the dielectric material stack and surrounding the first metal guard ring. Electrical testing features are disposed in the dielectric material stack, between the first metal guard ring and the second metal guard ring.
机译:描述了能够在线测试用于半导体封装的硅桥以及所得到的硅桥和半导体封装的保护环设计。在一示例中,半导体结构包括其上布置有绝缘层的衬底。金属化结构设置在绝缘层上。金属化结构包括布置在电介质材料堆叠中的导电布线。半导体结构还包括第一金属保护环,该第一金属保护环设置在介电材料堆叠中并围绕导电路径。第一金属保护环包括多个单独的保护环段。半导体结构还包括第二金属保护环,该第二金属保护环设置在介电材料堆叠中并围绕第一金属保护环。在第一金属保护环和第二金属保护环之间的电介质材料堆叠中布置电测试特征。

著录项

  • 公开/公告号US10418312B2

    专利类型

  • 公开/公告日2019-09-17

    原文格式PDF

  • 申请/专利权人 INTEL CORPORATION;

    申请/专利号US201515749465

  • 发明设计人 ARNAB SARKAR;SUJIT SHARAN;DAE-WOO KIM;

    申请日2015-10-29

  • 分类号H01L23/498;H01L23/544;H01L21/66;H01L23/58;H01L25/065;H01L23;H01L25/18;

  • 国家 US

  • 入库时间 2022-08-21 12:16:57

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