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Process for the formation of a graphene membrane component, graphene membrane component, microphone and hall-effect sensor
Process for the formation of a graphene membrane component, graphene membrane component, microphone and hall-effect sensor
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机译:形成石墨烯膜成分的方法,石墨烯膜成分,麦克风和霍尔效应传感器
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摘要
A process for the formation of a graphene membrane component includes arranging a graphene membrane in a relaxed condition of the graphene membrane on a surface of a supportive substrate. The graphene membrane extends across a cut-out with an opening at the surface of the supportive substrate. The graphene membrane is moreover arranged so that a first portion of the graphene membrane is arranged on the surface of the supportive substrate and a second portion of the graphene membrane is arranged over the opening of the cut-out. The process further includes tensioning of the second portion of the graphene membrane, in order to convert the second portion of the graphene membrane to a tensioned condition, so that the second portion of the graphene membrane is permanently in the tensioned condition in an operating temperature range of the graphene membrane component.
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