System and method of multiplexing laser triggers and optically selecting multiplexed laser pulses for laser assisted device alteration testing of semiconductor device

摘要

A pulse laser test system including a conditioning pulse circuit, a probe pulse circuit, a pulse laser, a trigger mode controller, and a laser pulse modulator. The conditioning pulse circuit provides asynchronous conditioning trigger pulses at a selected rate. The probe pulse circuit provides a synchronized probe trigger pulse. The trigger mode controller selects the probe pulse circuit while the synchronized probe trigger pulse is provided causing the pulse laser to provide a synchronized probe laser pulse, and otherwise selects the output of the conditioning pulse circuit causing the pulse laser to provide asynchronous conditioning laser pulses. The laser pulse modulator has an optical input coupled to the laser output of the pulse laser, has a gating input receiving a gate signal from the trigger mode controller, and has an optical output that provides laser pulses passed from the pulse laser while the gate signal is asserted.